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Microtexture Measurement of Copper Damascene Line with EBSD

著者名:
Kim, D.-I.
Paik, J.-M.
Joo, Y.-C.
Oh, K.H.
Lee, H.-C.
Dicks, K.
さらに 1 件
掲載資料名:
Textures of materials : ICOTOM 13 : proceedings of the 13th International Conference on Textures of Materials, Seoul, Korea, August 26-30, 2002
シリーズ名:
Materials science forum
シリーズ巻号:
408-412
発行年:
2002
開始ページ:
529
終了ページ:
534
総ページ数:
6
出版情報:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499038 [0878499032]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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