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Yield Strength Determination of TiN Film by In-Situ XRD Stress Analysis Method

著者名:
Qin, M.
Ji, V.
Xu, J.H.
Li, J.B.
Xu, K.W.
Ma, S.L.
さらに 1 件
掲載資料名:
ECRS 6 : proceedings of the 6th European Conference on Residual Stresses, Coimbra, Portugal, 10-12 July, 2002
シリーズ名:
Materials science forum
シリーズ巻号:
404-407
発行年:
2002
開始ページ:
671
終了ページ:
676
総ページ数:
6
出版情報:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499007 [0878499008]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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