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Large-area definition of nanoelectrodes by nanoimprint lithography

著者名:
Wissen, M. ( Univ. of Wuppertal (Germany) )
Scheer, H.-C.
Schulz, H.
Horstmann, J. T. ( Univ. of Dortmund (Germany) )
Scherff, M. ( Univ. of Hagen (Germany) )
Fahrner, W. R.
さらに 1 件
掲載資料名:
Fifth International Symposium on Instrumentation and Control Technology : 24-27 October 2003, Beijing, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5253
発行年:
2003
開始ページ:
122
終了ページ:
129
総ページ数:
8
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819451378 [0819451371]
言語:
英語
請求記号:
P63600/5253
資料種別:
国際会議録

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