Integrated Fabry-Perot microcavity based on surface micromachining processes

Integrated Fabry-Perot microcavity based on surface micromachining processes

著者名:

Mueller, R. ( National Institute for R&D in Microtechnologies (Romania) )

Syvridis, D. ( Univ. of Athens (Greece) )

Kusko, M. ( National Institute for R&D in Microtechnologies (Romania) )

Cristea, D.

Apostol, D. ( National Institute for Laser, Plasma and Radiation Physics (Romania) )

Damian, V. S.

Bercu, M. ( Univ. of Bucharest (Romania) )

Manea, E. ( National Institute for R&D in Microtechnologies (Romania) )

さらに 3 件

掲載資料名:

Advanced topics in optoelectronics, microelectronics, and nanotechnologies : 21-23 November, 2002, Bucharest, Romania

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5227

発行年:

2003

開始ページ:

361

終了ページ:

365

総ページ数:

5

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819451002 [0819451002]

言語:

英語

請求記号:

P63600/5227

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013161
シリーズID:	PA00000029
会議名:	Optoelectronics, microelectronics, and nanotechnologies
回次:	2002
会議開催地:	Bucharest, Romania
会議開催年:	2002.11.21-2002.11.23

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