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Fabrication of micropyramid prism array with coding gray-tone mask method

著者名:
掲載資料名:
Lithographic and micromachining techniques for optical component fabrication II : 3-4 August 2003, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5183
発行年:
2003
開始ページ:
116
終了ページ:
122
総ページ数:
7
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819450562 [0819450561]
言語:
英語
請求記号:
P63600/5183
資料種別:
国際会議録

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