Fabrication of polymer cantilevers for force-controlled atomic force microscope
- 著者名:
- Kato, N. ( Kinki Univ. (Japan) )
- Park, C. S. ( Technology Research Institute of Osaka Prefecture (Japan) )
- Matsumoto, T. ( Kinki Univ. (Japan) )
- Kikuta, H. ( Osaka Prefecture Univ. (Japan) )
- Iwata, K.
- 掲載資料名:
- Lithographic and micromachining techniques for optical component fabrication II : 3-4 August 2003, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5183
- 発行年:
- 2003
- 開始ページ:
- 71
- 終了ページ:
- 78
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819450562 [0819450561]
- 言語:
- 英語
- 請求記号:
- P63600/5183
- 資料種別:
- 国際会議録
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