Beginning-to-end wafer bonding for advanced optical systems (Invited Paper)

Beginning-to-end wafer bonding for advanced optical systems (Invited Paper)

著者名:

Farrens, S.N. ( EV Group Inc. (USA) )
Lindner, P. ( EV Group Inc. (Austria) )
Dwyer, S. ( EV Group Inc. (USA) )
Wimplinger, M. ( EV Group Inc. (USA) )

掲載資料名:

Gradient index, miniature, and diffractive optical systems III : 6-7 August 2003, San Diego, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5177

発行年:

2003

開始ページ:

31

終了ページ:

36

総ページ数:

6

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819450500 [0819450502]

言語:

英語

請求記号:

P63600/5177

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013147
シリーズID:	PA00000029
会議名:	Optics & Photonics : Gradient Index, Miniature, and Diffractive Optical Systems
回次:	2003 : 3rd
会議開催地:	San Diego, CA, USA
会議開催年:	2003.08.06-2003.08.07

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