Interference microscope for sub-Angstrom surface roughness measurements
- 著者名:
- Saxer, C. ( ADE Phase Shift (USA) )
- Freischlad, K. ( ADE Phase Shift (USA) )
- 掲載資料名:
- Optical Measurement Systems for Industrial Inspection III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5144
- 発行年:
- 2003
- 開始ページ:
- 37
- 終了ページ:
- 45
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819450142 [0819450146]
- 言語:
- 英語
- 請求記号:
- P63600/5144
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
Society of Photo-optical Instrumentation Engineers |
Electrochemical Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
10
国際会議録
Linewidth roughness and cross-sectional measurements of sub-50 nm structures with CD-SAXS and CD-SEM
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |