Stress-induced leakage currents of silicon oxides in flash EEPROM transistor
- 著者名:
- Kang, C.S. ( Yuhan College (South Korea) )
- 掲載資料名:
- Nanotechnology
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5118
- 発行年:
- 2003
- 開始ページ:
- 620
- 終了ページ:
- 627
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449788 [0819449784]
- 言語:
- 英語
- 請求記号:
- P63600/5118
- 資料種別:
- 国際会議録
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