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Design considerations of electrostatic forces in microaccelerometers

著者名:
  • Dong, J. ( Tsinghua Univ. (China) )
  • Wu, X. ( Carnegie Mellon Univ. (USA) )
掲載資料名:
Smart Sensors, Actuators, and MEMS
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5116
発行年:
2003
巻:
2
パート:
Poster Session
開始ページ:
690
終了ページ:
698
総ページ数:
9
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
言語:
英語
請求記号:
P63600/5116
資料種別:
国際会議録

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