Modification on surface roughness by combining dry and wet etching

Modification on surface roughness by combining dry and wet etching

著者名:

Lee, C.-C. ( National Chiao Tung Univ. (Taiwan) )
Hsu, W. ( National Chiao Tung Univ. (Taiwan) )

掲載資料名:

Smart Sensors, Actuators, and MEMS

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5116

発行年:

2003

巻:

2

パート:

Session 10

開始ページ:

627

終了ページ:

635

総ページ数:

9

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449764 [0819449768]

言語:

英語

請求記号:

P63600/5116

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013104
シリーズID:	PA00000029
会議名:	Microtechnologies for the New Millennium : Smart Sensors, Actuators, and MEMS
回次:	2003
会議開催地:	Maspalomas, Gran Canaria, Spain
会議開催年:	2003.05.19-2003.05.21
論文注記:	Session 10. MEMS III ; 5116-80

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