Fabrication of nano-interdigitated electrodes

Fabrication of nano-interdigitated electrodes

著者名:

Berdondini, L. ( Univ. de Neuchatel (Switzerland) )

Kalbac, M. ( Charles Univ. (Czech Republic) )

Gautsch, S. ( Univ. de Neuchatel (Switzerland) )

Gullo, M. ( Univ. de Neuchatel (Switzerland) )

Staufer, U. ( Univ. de Neuchatel (Switzerland) )

Koudelka-Hep, M. ( Univ. de Neuchatel (Switzerland) )

de Rooij, N.F. ( Univ. de Neuchatel (Switzerland) )

さらに 2 件

掲載資料名:

Smart Sensors, Actuators, and MEMS

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5116

発行年:

2003

巻:

1

パート:

Session 7

開始ページ:

402

終了ページ:

405

総ページ数:

4

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449764 [0819449768]

言語:

英語

請求記号:

P63600/5116

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013104
シリーズID:	PA00000029
会議名:	Microtechnologies for the New Millennium : Smart Sensors, Actuators, and MEMS
回次:	2003
会議開催地:	Maspalomas, Gran Canaria, Spain
会議開催年:	2003.05.19-2003.05.21
論文注記:	Seesion 7. MEMS II ; 5116-53

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