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Design and fabrication of a three-dimensional long-stretch micro drive by electroplating

著者名:
  • Wu, C.-T. ( National Chiao Tung Univ. (Taiwan) )
  • Tai, W.-C. ( National Chiao Tung Univ. (Taiwan) )
  • Hsu, C.-P. ( National Chiao Tung Univ. (Taiwan) )
  • Hsu, W. ( National Chiao Tung Univ. (Taiwan) )
掲載資料名:
Smart Sensors, Actuators, and MEMS
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5116
発行年:
2003
巻:
1
パート:
Session 5
開始ページ:
295
終了ページ:
302
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
言語:
英語
請求記号:
P63600/5116
資料種別:
国際会議録

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