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Shell-type micromechanical oscillator

著者名:
Zalalutdinov, M. ( Cornell Univ. (USA) )
Aubin, K.L. ( Cornell Univ. (USA) )
Michael, C. ( Univ. of Illinois/Urbana-Champaign (USA) )
Reichenbach, R.B. ( Cornell Univ. (USA) )
Alan, T. ( Cornell Univ. (USA) )
Zehnder, A.T. ( Cornell Univ. (USA) )
Houston, B.H. ( Naval Research Lab. (USA) )
Parpia, J.M. ( Cornell Univ. (USA) )
Craighead, H.G. ( Cornell Univ. (USA) )
さらに 4 件
掲載資料名:
Smart Sensors, Actuators, and MEMS
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5116
発行年:
2003
巻:
1
パート:
Session 4
開始ページ:
229
終了ページ:
236
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449764 [0819449768]
言語:
英語
請求記号:
P63600/5116
資料種別:
国際会議録

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