Low-temperature InOx thin films for O3 and NO2 gas sensing

Low-temperature InOx thin films for O3 and NO2 gas sensing

著者名:

Kiriakidis, G. ( Foundation for Research and Technology-Hellas (Greece) )
Ouacha, H. ( Foundation for Research and Technology-Hellas (Greece) )
Katsarakis, N. ( Foundation for Research and Technology-Hellas (Greece) )
Galatsis, K. ( RMIT Univ. (Australia) )
Wlodarski, W. ( RMIT Univ. (Australia) )

掲載資料名:

Smart Sensors, Actuators, and MEMS

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5116

発行年:

2003

巻:

1

パート:

Session 2

開始ページ:

84

終了ページ:

91

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819449764 [0819449768]

言語:

英語

請求記号:

P63600/5116

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013104
シリーズID:	PA00000029
会議名:	Microtechnologies for the New Millennium : Smart Sensors, Actuators, and MEMS
回次:	2003
会議開催地:	Maspalomas, Gran Canaria, Spain
会議開催年:	2003.05.19-2003.05.21
論文注記:	Session 2. Sensors I ; 5116-10

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