Stereolithography of lead zirconate titanate ceramics for MEMS applications
- 著者名:
- Dufaud, O. ( Ecole Nationale Superieure des Industries Chimiques (France) )
- Gall, H.L. ( Ecole Nationale Superieure des Industries Chimiques (France) )
- Corbel, S. ( Ecole Nationale Superieure des Industries Chimiques (France) )
- 掲載資料名:
- Smart Sensors, Actuators, and MEMS
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5116
- 発行年:
- 2003
- 巻:
- 1
- パート:
- Session 1
- 開始ページ:
- 28
- 終了ページ:
- 37
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819449764 [0819449768]
- 言語:
- 英語
- 請求記号:
- P63600/5116
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
8
国際会議録
Reliable integration of piezoelectric lead zirconate titanate with MEMS fabrication processes
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
国際会議録
Uniaxial stress dependence of the piezoelectric properties of lead zirconate titanate ceramics
SPIE - The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
11
国際会議録
Characteristics of Thick Sol-Gel Lead Zirconate Titanate Films for Angular Rate Sensor Application
Materials Research Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |