Influence of the electrochemical process of the macroporous silicon fabrication on surface local chemical states
- 著者名:
- Lytvynenko, O.O. ( Institute of Semiconductor Physics (Ukraine) )
- Karachevtseva, L.A. ( Institute of Semiconductor Physics (Ukraine) )
- Malovichko, E.A. ( Institute of Semiconductor Physics (Ukraine) )
- Stronska, O.I. ( Institute of Semiconductor Physics (Ukraine) )
- Karas, M.I. ( Institute of Semiconductor Physics (Ukraine) )
- 掲載資料名:
- Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5065
- 発行年:
- 2003
- 開始ページ:
- 181
- 終了ページ:
- 187
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448712 [0819448710]
- 言語:
- 英語
- 請求記号:
- P63600/5065
- 資料種別:
- 国際会議録
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SPIE - The International Society of Optical Engineering |
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10
国際会議録
Low temperature hydrogen diffusion in silicon:influence of substrate quality and the surface damage
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