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Warpage measurement system with systematic error analysis

著者名:
  • Qiu, Y. ( Tianjin Univ. (China) )
  • Ding, H. ( Georgia Institute of Technology (USA) )
  • Ume, I.C. ( Georgia Institute of Technology (USA) )
  • Kang, Y. ( Tianjin Univ. (China) )
掲載資料名:
Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5058
発行年:
2003
開始ページ:
627
終了ページ:
632
総ページ数:
6
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448644 [0819448648]
言語:
英語
請求記号:
P63600/5058
資料種別:
国際会議録

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