Optical interferometric measurements of the static/dynamic response characteristics of MEMS ultrasonic transducers
- 著者名:
- Blackshire, J.L. ( Air Force Research Lab. (USA) )
- Sathish, S. ( Univ. of Dayton Research Institute (USA) )
- 掲載資料名:
- Testing, Reliability, and Application of Micro- and Nano-Material Systems
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5045
- 発行年:
- 2003
- 開始ページ:
- 172
- 終了ページ:
- 182
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448507 [0819448508]
- 言語:
- 英語
- 請求記号:
- P63600/5045
- 資料種別:
- 国際会議録
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10
国際会議録
Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy
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