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Acoustic microscopy: a powerful tool to inspect microstructures of electronic devices (Invited Paper)

著者名:
掲載資料名:
Testing, Reliability, and Application of Micro- and Nano-Material Systems
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5045
発行年:
2003
開始ページ:
112
終了ページ:
121
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448507 [0819448508]
言語:
英語
請求記号:
P63600/5045
資料種別:
国際会議録

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