Practical quality metrics for resolution enhancement software
- 著者名:
Boone, R.E. ( Motorola, Inc. (USA) ) Lucas, K. ( Motorola, Inc. (USA) ) Wynd, R. ( Elibrium LLC (USA) ) Boatright, M. ( Motorola, Inc. (USA) ) Thompson, M.A. ( Motorola, Inc. (USA) ) Reich, A.J. ( Motorola, Inc. (USA) ) - 掲載資料名:
- Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5043
- 発行年:
- 2003
- 開始ページ:
- 162
- 終了ページ:
- 171
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448484 [0819448486]
- 言語:
- 英語
- 請求記号:
- P63600/5043
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |