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PsmLint: bringing AltPSM benefits to the IC design stage

著者名:
  • Ghosh, P. ( Numerical Technologies, Inc. (USA) )
  • Kang, C. ( Numerical Technologies, Inc. (USA) )
  • Sanie, M. ( Numerical Technologies, Inc. (USA) )
  • Huckabay, J.A. ( Cadence Design Systems, Inc. (USA) )
掲載資料名:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5042
発行年:
2003
開始ページ:
314
終了ページ:
325
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448477 [0819448478]
言語:
英語
請求記号:
P63600/5042
資料種別:
国際会議録

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