Ultra line-narrowed ArF excimer laser G42A for sub-90-nm lithography generation
- 著者名:
Saito, T. ( Gigaphoton Inc. (Japan) ) Suzuki, T. ( Gigaphoton Inc. (Japan) ) Yoshino, M. ( Gigaphoton Inc. (Japan) ) Wakabayashi, O. ( Komatsu Ltd. (Japan) ) Matsunaga, T. ( Gigaphoton Inc. (Japan) ) Fujimoto, J. ( Gigaphoton Inc. (Japan) ) Kakizaki, K. ( Gigaphoton Inc. (Japan) ) Yamazaki, T. ( Gigaphoton Inc. (Japan) ) Inoue, T. ( Gigaphoton Inc. (Japan) ) Terashima, K. ( Gigaphoton Inc. (Japan) ) Enami, T. ( Gigaphoton Inc. (Japan) ) Inoue, H. ( Gigaphoton Inc. (Japan) ) Sumitani, A. ( Komatsu Ltd. (Japan) ) Tomaru, H. ( Gigaphoton Inc. (Japan) ) Mizoguchi, H. ( Gigaphoton Inc. (Japan) ) - 掲載資料名:
- Optical Microlithography XVI
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5040
- 発行年:
- 2003
- 巻:
- Part Three
- 開始ページ:
- 1704
- 終了ページ:
- 1711
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448453 [0819448451]
- 言語:
- 英語
- 請求記号:
- P63600/5040
- 資料種別:
- 国際会議録
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