Blank Cover Image

Novel development method to improve critical dimensional control

著者名:
掲載資料名:
Advances in Resist Technology and Processing XX
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5039
発行年:
2003
巻:
2
パート:
Poster Session
開始ページ:
1343
終了ページ:
1352
総ページ数:
10
出版情報:
Bellingham, CA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448446 [0819448443]
言語:
英語
請求記号:
P63600/5039
資料種別:
国際会議録

類似資料:

1 国際会議録 Novel development method for CD control: optimized spin-off development method

Sakamoto, K., Nishiya, A., Yamamura, K., Otsuka, T.

SPIE-The International Society for Optical Engineering
7 国際会議録 Novel resist development system for photomasks

Itoh, M., Sakurai, H., Esaki, Y., Ooishi, K., Sakamoto, K.

SPIE-The International Society for Optical Engineering
2 国際会議録 Novel develop application method to improve critical dimension control

Sakamoto,K.

SPIE-The International Society for Optical Engineering
8 国際会議録 Development of novel method to create two-dimensional photonic crystals

Hase,M., Egashira,M., Shinya,N., Kojima,K.M., Uchida,S., Ueta,T., Ohtaka,K.

SPIE - The International Society for Optical Engineering
3 国際会議録 Improved scatterometry method of critical dimension measurements and its application for control of development process [6152-16]

Pundaleva, I., Nam, D., Han, H., Lee, D., Han, W.

SPIE - The International Society of Optical Engineering
9 国際会議録 Improved critical dimension control in 0.8-NA Laser reticle writers

Hamaker,H.C., Valetin,G.E., Martyniuk,J., Martinez,B.G., Pochkowski,J.M., Hodgson,L.D.

SPIE - The International Society for Optical Engineering
4 国際会議録 Complementary feed-forward and feedback method for improved critical dimension control

Jekauc, I., Gould, C.J., Hartner, W., Urenda, T.

SPIE - The International Society of Optical Engineering
10 国際会議録 Critical dimension (CD) control in 157-nm lithography

Hori, S., Yoshihara, K., Kyoda, H., Matsui, H., Furukawa, T., Miyoshi, S., Kawaguchi, E., Itani, T.

SPIE-The International Society for Optical Engineering
5 国際会議録 Novel polymeric antireflective coating(PARC)for better uniformity control of critical dimension

Linliu,K., Kuo,M.-R., Huang,Y.-R.

SPIE - The International Society for Optical Engineering
11 国際会議録 Development of the 3D adapter using an optical grating film for stereoscopic viewing

K. Sakamoto, T. Morii

SPIE - The International Society of Optical Engineering
6 国際会議録 Optimization of multi-step development scheme to improve the critical dimension uniformity

Chang, H., Lin, B. S. -M., Hung, K. -C., Fang, S. -P., Hsu, T.

SPIE - The International Society of Optical Engineering
12 国際会議録 A method of 3D measuring for finger pointing using a single camera

H. Nakayama, K. Sakamoto

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12