Blank Cover Image

Line-edge roughness (LER) optimization on 300-mm DUV alternating phase shift (altPSM) processes

著者名:
Ho, B.C.P. ( Tokyo Electron Texas, LLC (USA) )
Guenther, D. ( International SEMATECH (USA) )
Cheng, M. ( Texas A&M Univ. (USA) )
Sotoodeh, K. ( International SEMATECH (USA) )
Rudack, A. ( International SEMATECH (USA) )
Yamaguchi, R. ( Tokyo Electron Texas, LLC (USA) )
Brown, B. ( Tokyo Electron Texas, LLC (USA) )
Ickes, M. ( Tokyo Electron Texas, LLC (USA) )
Nafus, K. ( Tokyo Electron Texas, LLC (USA) )
さらに 4 件
掲載資料名:
Advances in Resist Technology and Processing XX
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5039
発行年:
2003
巻:
2
パート:
Poster Session
開始ページ:
1229
終了ページ:
1241
総ページ数:
13
出版情報:
Bellingham, CA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448446 [0819448443]
言語:
英語
請求記号:
P63600/5039
資料種別:
国際会議録

類似資料:

Cheng, M., Ho, B.C.P., Nafus, K.

SPIE-The International Society for Optical Engineering

Zurbrick, L.S., Rudzinski, M., He, L., Kimmel, K.R., Williams, A.

SPIE - The International Society of Optical Engineering

Cheng, M., Ho, B.C.P., Guenther, D.E.

SPIE-The International Society for Optical Engineering

Tsai,W., Qian,Q., Buckmann,K.M., Cheng,W.-H., He,L., Irvine,B., Kamna,M., Korobko,Y., Kovalchick,M., Labovitz,S.M., …

SPIE-The International Society for Optical Engineering

Yamaguchi, A., Ichinose, K., Shimamoto, S., Fukuda, H., Tsuchiya, R., Ohnishi, K., Kawada, H., Iizumi, T.

SPIE - The International Society of Optical Engineering

T. Schuster, S. Rafler, K. Frenner, W. Osten

Society of Photo-optical Instrumentation Engineers

Cheng, M., Ho, B.C.P., Yamaguchi, R., Yoshioka, K., Yaegashi, H.

SPIE - The International Society of Optical Engineering

Choo,L.-C., Tam,S.-C., Cheng,A., Ho,I.C.

SPIE-The International Society for Optical Engineering

Sturtevant,J.L., Ho,B.C.P., Geiszler,V.C., Herrick,M.T., King,C.F., Carter,R.L., Roman,B.J., Litt,L.C., Smith,B., …

SPIE - The International Society for Optical Engineering

Williamson, M.V., Neureuther, A.R.

SPIE - The International Society of Optical Engineering

Yamaguchi, T., Namatsu, H., Nagase, M., Kurihara, K., Kawai, Y.

SPIE - The International Society of Optical Engineering

Williamson, M.V., Neureuther, A.R.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12