Highly etch-selective spin-on bottom antireflective coating for use in 193-nm lithography and beyond
- 著者名:
Pfeiffer, D. ( IBM Thomas J. Watson Research Ctr. (USA) ) Mahorowala, A.P. ( IBM Thomas J. Watson Research Ctr. (USA) ) Babich, K. ( IBM Thomas J. Watson Research Ctr. (USA) ) Medeiros, D.R. ( IBM Thomas J. Watson Research Ctr. (USA) ) Petrillo, K.E. ( IBM Thomas J. Watson Research Ctr. (USA) ) Angelopoulos, M. ( IBM Thomas J. Watson Research Ctr. (USA) ) Huang, W.-S. ( IBM Microelectronics Div. (USA) ) Halle, S. ( IBM Microelectronics Div. (USA) ) Brodsky, C. ( IBM Microelectronics Div. (USA) ) Allen, S.D. ( IBM Microelectronics Div. (USA) ) Holmes, S.J. ( IBM Microelectronics Div. (USA) ) Kwong, R.W. ( IBM Microelectronics Div. (USA) ) Lang, R. ( IBM Microelectronics Div. (USA) ) Brock, P.J. ( IBM Almaden Research Ctr. (USA) ) - 掲載資料名:
- Advances in Resist Technology and Processing XX
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5039
- 発行年:
- 2003
- 巻:
- 1
- パート:
- Session 4
- 開始ページ:
- 136
- 終了ページ:
- 143
- 総ページ数:
- 8
- 出版情報:
- Bellingham, CA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448446 [0819448443]
- 言語:
- 英語
- 請求記号:
- P63600/5039
- 資料種別:
- 国際会議録
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