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Measurement of the dielectric function spectra of low dielectric constant using the spectroscopic ellipsometry

著者名:
Horie, M. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
Postava, K. ( Technical Univ. of Ostrava (Czech Republic) )
Yamaguchi, T. ( Shizuoka Univ. (Japan) )
Akashika, K. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
Hayashi, H. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
Kitamura, F. ( Dainippon Screen Manufacturing Co., Ltd. (Japan) )
さらに 1 件
掲載資料名:
Metrology, Inspection, and Process Control for Microlithography XVII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5038
発行年:
2003
巻:
2
開始ページ:
803
終了ページ:
809
総ページ数:
7
出版情報:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448439 [0819448435]
言語:
英語
請求記号:
P63600/5038
資料種別:
国際会議録

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