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Total process control of alignment and overlay for metal layer

著者名:
  • Zhou, W. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
  • Li, Z.Q. ( Chartered Semiconductor Manufacturing Ltd (Singapore) )
  • Ng, L.K.C. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
  • Ng, T.H. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
  • Lim, H.K. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
掲載資料名:
Metrology, Inspection, and Process Control for Microlithography XVII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5038
発行年:
2003
巻:
2
開始ページ:
769
終了ページ:
780
総ページ数:
12
出版情報:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448439 [0819448435]
言語:
英語
請求記号:
P63600/5038
資料種別:
国際会議録

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