Blank Cover Image

CD control at low K1 optical lithography in DRAM device

著者名:
Hong, J. ( Hynix Semiconductor Inc. (South Korea) )
Woo, C. ( Hynix Semiconductor Inc. (South Korea) )
Park, J. ( Hynix Semiconductor Inc. (South Korea) )
Cho, B. ( Hynix Semiconductor Inc. (South Korea) )
Choi, J.-S. ( Hynix Semiconductor Inc. (South Korea) )
Yang, H. ( Hynix Semiconductor Inc. (South Korea) )
Park, C. ( Hynix Semiconductor Inc. (South Korea) )
Shin, Y.-C. ( Hynix Semiconductor Inc. (South Korea) )
Kim, Y. ( Hynix Semiconductor Inc. (South Korea) )
Jeong, G. ( Hynix Semiconductor Inc. (South Korea) )
Kim, J. ( Hynix Semiconductor Inc. (South Korea) )
Kang, K. ( Hynix Semiconductor Inc. (South Korea) )
Kang, C. ( Hynix Semiconductor Inc. (South Korea) )
Yim, D. ( Hynix Semiconductor Inc. (South Korea) )
Song, Y. ( Hynix Semiconductor Inc. (South Korea) )
さらに 10 件
掲載資料名:
Metrology, Inspection, and Process Control for Microlithography XVII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5038
発行年:
2003
巻:
1
開始ページ:
406
終了ページ:
414
総ページ数:
9
出版情報:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448439 [0819448435]
言語:
英語
請求記号:
P63600/5038
資料種別:
国際会議録

類似資料:

1 国際会議録 Aberration sensitivity control for the isolation layer in low-k1 DRAM process

Cho, B.-H., Yim, D., Park, C.-H., Lee, S.-H., Yang, H.-J., Choi, J.-H., Shin, Y.-C., Kim, C.-D., Choi, J.-S., Kang, …

SPIE-The International Society for Optical Engineering
7 国際会議録 Issues and challenges of double patterning lithography in DRAM

S. Kim, S. Koo, J. Choi, Y. Hwang, J. Park, E. Kang, C. Lim, S. Moon, J. Kim

SPIE - The International Society of Optical Engineering
2 国際会議録 OPC accuracy and process window verification methodology for sub-100-nm node

Yang, H., Park, C., Hong, J., Jeong, G., Cho, B., Choi, J., Kang, C., Yang, K., Kang, E., Ji, S., Yim, D., Song, Y.

SPIE - The International Society of Optical Engineering
8 国際会議録 Layer-specific illumination for low-k1 periodic and semiperiodic DRAM cell patterns: design procedure and application

Hwang, C., Nam, D.-S., Park, J.-H., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE - The International Society of Optical Engineering
3 国際会議録 Optimum field-size strategy for DRAM mass production in low-k1 process

Park,C.-H., Yim,D., Lee,S.-H., Yang,H.-J., Choi,J.-H., Shin,Y.-C., Kim,C.-D., Choi,J.-S., Kang,K.-O., Kim,S.-W., …

SPIE-The International Society for Optical Engineering
9 国際会議録 Advanced module-based approach to effective CD prediction of sub-100nm patterns

Shin, J., Kim, I., Hwang, C., Park, D.-W., Woo, S.-G., Cho, H.-K., Han, W.-S., Moon, J.-T.

SPIE - The International Society of Optical Engineering
4 国際会議録 Spatial optical modulator (SOM): high-density diffractive laser projection display

S. Yun, J. Song, I. Yeo, Y. Choi, V. Yurlov, S. An, H. Park, H. Yang, Y. Lee, K. Han, I. Shyshkin, A. Lapchuk, K. Oh, S. …

SPIE - The International Society of Optical Engineering
10 国際会議録 Fully optical backplane system using novel optical plug aand slot [6014-19]

Cho I.-K., Ahn S.-H., Lee W.-J., Han S.-H., Kim J.-T., Choi C.-K., Shin K., Yoon K. B., Jeong M.-Y., Park H. H.

SPIE - The International Society of Optical Engineering
5 国際会議録 Process latitude extension in low k1 DRAM lithography using specific layer-oriented illumination design

Kang, Y.S., Nam, D.-S., Hwang, C., Woo, S.-G., Cho, H.-K., Han, W.-S.

SPIE-The International Society for Optical Engineering
11 国際会議録 0.33-k1 ArF lithography for 100-nm DRAM

Bok, C.K., Kim, S.-K., Kim, H.-B., Oh, J.-S., Ahn, C.-N., Shin, K.-S.

SPIE-The International Society for Optical Engineering
6 国際会議録 New OPC verification method using die-to-database inspection [6152-119]

Yang, H., Choi, J., Cho, B, Hong, J., Song, J., Yim, D., Kim, J., Yamamoto. M.

SPIE - The International Society of Optical Engineering
12 国際会議録 Lithography process design for 4-Gb DRAM of 0.31 k1 with KrF

Park,J., Yeo,G., Kim,I., Kim,B.-S., Lee,J., Cho,H., Moon,J.T.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12