Optical analysis of mirror-based pattern generation
- 著者名:
- Shroff, Y.A. ( Univ. of California/Berkeley (USA) )
- Chen, Y. ( Univ. of California/Berkeley (USA) )
- Oldham, W.G. ( Univ. of California/Berkeley (USA) )
- 掲載資料名:
- Emerging Lithographic Technologies VII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5037
- 発行年:
- 2003
- 巻:
- 1
- パート:
- Session 15
- 開始ページ:
- 550
- 終了ページ:
- 559
- 総ページ数:
- 10
- 出版情報:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448422 [0819448427]
- 言語:
- 英語
- 請求記号:
- P63600/5037
- 資料種別:
- 国際会議録
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