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Production scale MOVPE reactors for electronic and optoelectronic applications

著者名:
Protzmann, H. ( AIXTRON AG (Germany) )
Gerstenbrandt, G. ( AIXTRON AG (Germany) )
Alam, A. ( AIXTRON AG (Germany) )
Schoen, O. ( AIXTRON AG (Germany) )
Luenenbuerger, M. ( AIXTRON AG (Germany) )
Dikme, Y. ( RWTH-Aachen (Germany) )
Kalisch, H. ( RWTH-Aachen (Germany) )
Jansen, R.H. ( RWTH-Aachen (Germany) )
Heuken, M. ( AIXTRON AG (Germany) )
さらに 4 件
掲載資料名:
10th International Symposium on Nanostructures: Physics and Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5023
発行年:
2003
開始ページ:
72
終了ページ:
74
総ページ数:
3
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819448248 [0819448249]
言語:
英語
請求記号:
P63600/5023
資料種別:
国際会議録

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