Combination lithography for photonic crystal circuits
- 著者名:
- Murakowski, J.A. ( Univ. of Delaware (USA) )
- Schneider, G.J. ( Univ. of Delaware (USA) )
- Prather, D.W. ( Univ. of Delaware (USA) )
- 掲載資料名:
- Photonic Crystal Materials and Devices
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5000
- 発行年:
- 2003
- 開始ページ:
- 43
- 終了ページ:
- 50
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448002 [0819448001]
- 言語:
- 英語
- 請求記号:
- P63600/5000
- 資料種別:
- 国際会議録
類似資料:
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9
国際会議録
Fabrication of 3D silicon photonic crystal structures using conventional micromachining technology
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
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SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |