MOEMS spatial light modulator development at the Center for Adaptive Optics

MOEMS spatial light modulator development at the Center for Adaptive Optics

著者名:

Krulevitch, P.A. ( Lawrence Livermore National Lab. (USA) )

Bierden, P.A. ( Boston Micromachines Corp. (USA) )

Bifano, T.G. ( Boston Univ. (USA) )

Carr, E. ( Lawrence Livermore National Lab. (USA) )

Dimas, C.E. ( Boston Micromachines Corp. (USA) )

Dyson, H. ( Univ. of California/Berkeley (USA) )

Helmbrecht, M.A. ( Univ. of California/Berkeley (USA) )

Kurczynski, P. ( Univ. of California/Berkeley (USA) )

Muller, R.S. ( Univ. of California/Berkeley (USA) )

Olivier, S.S. ( Lawrence Livermore National Lab. (USA) )

Peter, Y.-A. ( Stanford Univ. (USA) )

Sadoulet, B. ( Lucent Technologies/Bell Labs. (USA) )

Solgaard, O. ( Stanford Univ. (USA) )

Yang, E.H. ( Jet Propulsion Lab. (USA) )

さらに 9 件

掲載資料名:

MOEMS and Miniaturized Systems III

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4983

発行年:

2003

開始ページ:

227

終了ページ:

234

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447838 [0819447838]

言語:

英語

請求記号:

P63600/4983

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012966
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and miniaturized systems
回次:	2003 : 3rd
会議開催地:	San Jose, CA, USA
会議開催年:	2003.01.27-2003.01.29

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1 国際会議録 MOEMS spatial light modulator development at the Center for Adaptive Optics Krulevitch, P.A., Bierden, P.A., Bifano, T.G., Carr, E., Dimas, C.E., Dyson, H., Helmbrecht, M.A., Kurczynski, P., … SPIE-The International Society for Optical Engineering	7 国際会議録 Microelectromechanical spatial light modulators with integrated electronics Cornelissen,S., Bifano,T.G., Bierden,P.A. SPIE-The International Society for Optical Engineering
2 国際会議録 Micro-electro-mechanical systems spatial light modulator development Olivier,S.S., Bierden,P.A., Bifano,T.G., Bishop,D.J., Carr,E., Cowan,W.D., Hart,M.R., Helmbrecht,M., Krulevitch,P., … SPIE-The International Society for Optical Engineering	8 国際会議録 MEMS spatial light modulators with integrated electronics Cornelissen,S., Bifano,T.G., Bierden,P.A. SPIE-The International Society for Optical Engineering
3 国際会議録 Large-scale polysilicon surface-micromachined spatial light modulator Dimas, C.E., Perreault, J., Cornelissen, S., Dyson, H., Krulevitch, P.A., Bierden, P.A., Bifano, T.G. SPIE-The International Society for Optical Engineering	9 国際会議録 MEMS spatial light modulators with integrated electronics Becker, T., Bifano, T.G., Lee, H., Miller, M., Bierden, P.A., Cornelissen, S. SPIE-The International Society for Optical Engineering
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5 国際会議録 Polysilicon surface-micromachined spatial light modulator with novel electronic integration Dimas, C.E., Bifano, T.G., Bierden, P.A., Perrault, J.A., Krulevitch, P., Roehnelt, R.T., Cornelissen, S. SPIE-The International Society for Optical Engineering	11 国際会議録 Large-scale metal MEMS mirror arrays with integrated electronics Bifano, T.G., Bierden, P.A., Cornelissen, S., Dimas, C.E., Lee, H., Miller, M., Perreault, J.A. SPIE-The International Society for Optical Engineering
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