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Tunable Fabry-Perot interferometer for 3- to 4.5-μm wavelength with bulk micromachined reflector carrier

著者名:
Kurth, S. ( Technische Univ. Chemnitz (Germany) )
Hiller, K.
Neumann, N. ( InfraTec GmbH (Germany) )
Heinze, M.
Doetzel, W. ( Technische Univ. Chemnitz (Germany) )
Gessner, T.
さらに 1 件
掲載資料名:
MOEMS and Miniaturized Systems III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4983
発行年:
2003
開始ページ:
215
終了ページ:
226
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447838 [0819447838]
言語:
英語
請求記号:
P63600/4983
資料種別:
国際会議録

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