Single-chip 1×84 MEMS mirror array for optical telecommunication applications (Invited Paper)
- 著者名:
Juneau, T.N. ( Analog Devices, Inc. (USA) ) Chen, T. Brosnihan, T. Rajaraman, S. Chau, K.H. Judy, M. - 掲載資料名:
- MOEMS and Miniaturized Systems III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4983
- 発行年:
- 2003
- 開始ページ:
- 53
- 終了ページ:
- 64
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447838 [0819447838]
- 言語:
- 英語
- 請求記号:
- P63600/4983
- 資料種別:
- 国際会議録
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2
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Performance of a high-stroke segmented MEMS deformable-mirror technology (Invited Paper) [6113-21]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |