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European roadmaps for MOEMS applications (Invited Paper)

著者名:
Salomon, P.R. ( 4M2C PATRIC SALOMON (Germany) )  
掲載資料名:
MOEMS and Miniaturized Systems III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4983
発行年:
2003
開始ページ:
1
終了ページ:
10
総ページ数:
10
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447838 [0819447838]
言語:
英語
請求記号:
P63600/4983
資料種別:
国際会議録

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