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3-D, Self-aligned, Micro-assembled, Electrical Interconnects for Heterogeneous Integration

著者名:
Huang, T. ( Zyvex Corp. (USA) )
Nilsen, E. ( Zyvex Corp. (USA) )
Ellis, M. ( Zyvex Corp. (USA) )
Kim, K. ( Zyvex Corp. (USA) )
Tsui, K. ( Zyvex Corp. (USA) )
Skidmore, G.D. ( Zyvex Corp. (USA) )
Goldsmith, C. ( MEMtronics Corp. (USA) )
Nallani, A. ( Univ. of Texas/Dallas (USA) )
Lee, J.B. ( Univ. of Texas/Dallas (USA) )
さらに 4 件
掲載資料名:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4981
発行年:
2003
開始ページ:
189
終了ページ:
201
総ページ数:
13
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447814 [0819447811]
言語:
英語
請求記号:
P63600/4981
資料種別:
国際会議録

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