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Use of thermal cycling to reduce adhesion of OTS coated coated MEMS cantilevers

著者名:
  • Ali, S.M. ( Univ. of Illinois/Urbana-Champaign (USA) )
  • Phinney, L.M. ( Univ. of Illinois/Urbana-Champaign (USA) )
掲載資料名:
Reliability, Testing, and Characterization of MEMS/MOEMS II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4980
発行年:
2003
開始ページ:
151
終了ページ:
162
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447807 [0819447803]
言語:
英語
請求記号:
P63600/4980
資料種別:
国際会議録

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