Degradation of monolayer lubricants for MEMS

Degradation of monolayer lubricants for MEMS

著者名:

Dugger, M.T. ( Sandia National Labs. (USA) )
Hohlfelder, R.J. ( Sandia National Labs. (USA) )
Peebles, D.E. ( Sandia National Labs. (USA) )

掲載資料名:

Reliability, Testing, and Characterization of MEMS/MOEMS II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4980

発行年:

2003

開始ページ:

138

終了ページ:

150

総ページ数:

13

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447807 [0819447803]

言語:

英語

請求記号:

P63600/4980

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012963
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, testing, and characterization of MEMS/MOEMS
回次:	2003 : 2nd
会議開催地:	San Jose, CA, USA
会議開催年:	2003.01.27-2003.01.29

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