Surface characterization and adhesion analysis for polysilicon micromachined flaps
- 著者名:
- Xue, X. ( Univ. of Illinois/Urbana-Champaign (USA) )
- Phinney, L.M. ( Univ. of Illinois/Urbana-Champaign (USA) )
- 掲載資料名:
- Reliability, Testing, and Characterization of MEMS/MOEMS II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4980
- 発行年:
- 2003
- 開始ページ:
- 130
- 終了ページ:
- 137
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447807 [0819447803]
- 言語:
- 英語
- 請求記号:
- P63600/4980
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
国際会議録
Experimental and computational study on laser heating of surface micromachined cantilevers [6111-09]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |