Anodic oxidation-induced delamination of the SUMMiT poly 0 to Silicon Nitride Interface
- 著者名:
- Plass, R.A. ( Sandia National Labs. (USA) )
- Walraven, J.A. ( Sandia National Labs. (USA) )
- Tanner, D.M. ( Sandia National Labs. (USA) )
- Sexton, F.W. ( Sandia National Labs. (USA) )
- 掲載資料名:
- Reliability, Testing, and Characterization of MEMS/MOEMS II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4980
- 発行年:
- 2003
- 開始ページ:
- 81
- 終了ページ:
- 86
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447807 [0819447803]
- 言語:
- 英語
- 請求記号:
- P63600/4980
- 資料種別:
- 国際会議録
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