Effect of VUV F2 laser irradiation on fluoride crystal

Effect of VUV F2 laser irradiation on fluoride crystal

著者名:

Kawaguchi, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Narazaki, A. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Sato, T. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Niino, H. ( National Institute of Advanced Industrial Science and Technology (Japan) )

掲載資料名:

Photon Processing in Microelectronics and Photonics II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4977

発行年:

2003

開始ページ:

369

終了ページ:

376

総ページ数:

8

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447777 [0819447773]

言語:

英語

請求記号:

P63600/4977

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012961
シリーズID:	PA00000029
会議名:	SPIE LASE : Photon processing in microelectronics and photonics
回次:	2003 : 2nd
会議開催地:	San Jose, CA, USA
会議開催年:	2003.01.27-2003.01.30

類似資料:

1 国際会議録 Onset of laser ablation in CaF2 crystal under excimer laser irradiation Kawaguchi, Y., Narazaki, A., Sato, T., Niino, H., Yabe, A. SPIE-The International Society for Optical Engineering	7 国際会議録 Surface microfabrication of fused silica glass by UV laser irradiation Niino, H., Kawaguchi, Y., Sato, T., Narazaki, A., Ding, X., Kurosaki, R. SPIE - The International Society of Optical Engineering
2 国際会議録 F2-laser-induced damage on transparent fluoride crystals Kawaguchi, Y., Narazaki, A., Sato, T., Kurosaki, R., Niino, H., Sato, H., Satonaga, T., Fukuda, T. SPIE - The International Society of Optical Engineering	8 国際会議録 Time-resolved monitoring of ZnO plume by ArF laser ablation: influence of surrounding gas Kawaguchi, Y., Narazaki, A., Sato, T., Niino, H. SPIE-The International Society for Optical Engineering
3 国際会議録 Laser ablation of nitrogen-solid films by UV ps-laser irradiation: surface modification of materials by fragments in laser ablation plume (Invited Paper) Niino, H., Sato, T., Narazaki, A., Kawaguchi, Y., Yabe, A. SPIE-The International Society for Optical Engineering	9 国際会議録 Laser direct-write and crystallization of FeSi2 micro-dot array for NIR light-emitting device application A. Narazaki, R. Kurosaki, T. Sato, Y. Kawaguchi, H. Niino SPIE - The International Society of Optical Engineering
4 国際会議録 Room-temperature fabrication of β-FeSl2 microprecipitates by pulsed laser deposition Narazaki, A., Sato, T., Kawaguchi, Y., Niino, H. SPIE - The International Society of Optical Engineering	10 国際会議録 Surface microstructuring of transparent materials by laser-induced backside wet etching using excimer laser Niino, H., Ding, X., Kurosaki, R., Narazaki, A., Sato, T., Kawaguchi, Y. SPIE - The International Society of Optical Engineering
5 国際会議録 Laser ablation plume of FeSi2 alloy target studied by TOF mass and optical emission spectroscopies Narazaki, A., Sato, T., Kawaguchi, Y., Niino, H. SPIE-The International Society for Optical Engineering	11 国際会議録 Fabrication of a microfluidic bioarray device using laser-machined surface microstructures T. Sato, R. Kurosaki, A. Narazaki, Y. Kawaguchi, H. Niino SPIE - The International Society of Optical Engineering
6 国際会議録 Surface microfabrication of silica glass by excimer laser irradiation of toluene solution Niino, H., Yasui, Y., Ding, X., Narazaki, A., Sato, T., Kawaguchi, Y., Yabe, A. SPIE-The International Society for Optical Engineering	12 国際会議録 Surface microstructures of silica glass by laser-induced backside wet etching H. Niino, Y. Kawaguchi, T. Sato, A. Narazaki, R. Kurosaki Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12