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Surface microfabrication of silica glass by excimer laser irradiation of toluene solution

著者名:
Niino, H. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Yasui, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Ding, X. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Narazaki, A. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Sato, T. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Kawaguchi, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Yabe, A. ( National Institute of Advanced Industrial Science and Technology (Japan) )
さらに 2 件
掲載資料名:
Photon Processing in Microelectronics and Photonics II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4977
発行年:
2003
開始ページ:
269
終了ページ:
280
総ページ数:
12
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447777 [0819447773]
言語:
英語
請求記号:
P63600/4977
資料種別:
国際会議録

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