Holographic fabrication of micron structures using interfered femtoseond laser beams split by diffractive optics
- 著者名:
- Nakata, Y. ( Kyushu Univ. (Japan) )
- Okada, T. ( Kyushu Univ. (Japan) )
- Maeda, M. ( Kyushu Univ. (Japan) )
- 掲載資料名:
- Photon Processing in Microelectronics and Photonics II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4977
- 発行年:
- 2003
- 開始ページ:
- 168
- 終了ページ:
- 179
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447777 [0819447773]
- 言語:
- 英語
- 請求記号:
- P63600/4977
- 資料種別:
- 国際会議録
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