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Algorithmic solutions for thermal and electrostatic simulation of MEMS (Invited Paper)

著者名:
Szekely, V. ( Budapest Univ. of Technology and Economics (Hungary) )  
掲載資料名:
MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4945
発行年:
2003
開始ページ:
159
終了ページ:
173
総ページ数:
15
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447401 [0819447404]
言語:
英語
請求記号:
P63600/4945
資料種別:
国際会議録

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