Fabrication and characterization of waveguide structures on SOI (Invited Paper)

Fabrication and characterization of waveguide structures on SOI (Invited Paper)

著者名:

Aalto, T.T. ( VTT Ctr. for Microelectronics (Finland) )
Heimala, P. ( VTT Ctr. for Microelectronics (Finland) )
Yliniemi, S. ( VTT Ctr. for Microelectronics (Finland) )
Kapulainen, M. ( VTT Ctr. for Microelectronics (Finland) )
Leppihalme, M.J. ( VTT Ctr. for Microelectronics (Finland) )

掲載資料名:

Integrated Optical Devices: Fabrication and Testing

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4944

発行年:

2003

開始ページ:

183

終了ページ:

194

総ページ数:

12

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819447395 [0819447390]

言語:

英語

請求記号:

P63600/4944

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00012928
シリーズID:	PA00000029
会議名:	Photonics Fabrication Europe : Integrated optical devices
回次:	2002
会議開催地:	Brugge, Belgium
会議開催年:	2002.10.30-2002.11.01

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