Thick PZT film/stainless steel actuator fabricated by aerosol deposition method: fatigue property
- 著者名:
- Lebedev, M. ( National Institute of Advanced Industrial Science and Technology (Japan) )
- Akedo, J. ( National Institute of Advanced Industrial Science and Technology (Japan) )
- 掲載資料名:
- Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4936
- 発行年:
- 2002
- 開始ページ:
- 345
- 終了ページ:
- 348
- 総ページ数:
- 4
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447319 [0819447315]
- 言語:
- 英語
- 請求記号:
- P63600/4936
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
国際会議録
Optical scanning devices based on PZT thiv¥ck films formed by aerosol deposition method [6037-80]
SPIE - The International Society of Optical Engineering |
Materials Research Society |
Trans Tech Publications | |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
Materials Research Society |