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Comparison between mechanical method and chemical-assisted mechanical method for CVD diamond film polishing

著者名:
  • Hsieh, C.-H. ( Industrial Technology Research Institute (Taiwan) )
  • Tsai, H.-Y. ( Industrial Technology Research Institute (Taiwan) )
  • Lai, H.-T. ( Industrial Technology Research Institute (Taiwan) )
  • Lin, H.-Y. ( Industrial Technology Research Institute (Taiwan) )
掲載資料名:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4936
発行年:
2002
開始ページ:
337
終了ページ:
344
総ページ数:
8
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819447319 [0819447315]
言語:
英語
請求記号:
P63600/4936
資料種別:
国際会議録

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