Patterning of thin films of TiNi deposited on silicon substrate
- 著者名:
- Mathe, V.K. ( RMIT Univ. (Australia) )
- Sood, D.K. ( RMIT Univ. (Australia) )
- Hayes, J.P. ( Swinburne Univ. of Technology (Australia) )
- 掲載資料名:
- Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4936
- 発行年:
- 2002
- 開始ページ:
- 135
- 終了ページ:
- 145
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447319 [0819447315]
- 言語:
- 英語
- 請求記号:
- P63600/4936
- 資料種別:
- 国際会議録
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6
国際会議録
Novel method for electroplating on silicon without the need of a continuous-plating base film
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