System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm
- 著者名:
- Gliech, S. ( Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany) )
- Gessner, H.
- Duparre, A.
- 掲載資料名:
- Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4932
- 発行年:
- 2003
- 開始ページ:
- 452
- 終了ページ:
- 457
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447272 [0819447277]
- 言語:
- 英語
- 請求記号:
- P63600/4932
- 資料種別:
- 国際会議録
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10
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Characterizing CaF2 for VUV optical components: roughness, surface scatter, and bulk scatter
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